Picosecond Micromachining Update
نویسندگان
چکیده
منابع مشابه
Effects of Laser Operating Parameters on Piezoelectric Substrates Micromachining with Picosecond Laser
Ten picoseconds (200 kHz) ultrafast laser micro-structuring of piezoelectric substrates including AT-cut quartz, Lithium Niobate and Lithium Tantalate have been studied for the purpose of piezoelectric devices application ranging from surface acoustic wave devices, e.g., bandpass filters, to photonic devices such as optical waveguides and holograms. The study examines the impact of changing sev...
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Bulk silicon etching techniques, used to selectively remove silicon from substrates, have been broadly applied in the fabrication of micromachined sensors, actuators, and structures. Despite the more recent emergence of higher resolution, surfacemicromachining approaches, the majority of currently shipping silicon sensors are made using bulk etching. Particularly in light of newly introduced dr...
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With the trend towards miniaturization, micromachining becomes more and more important in fabricating micro parts. Investigations have shown that unpredictable tool life and premature tool failure present a serious concern in micromachining. To further develop the process, a systematic study of various types of tool geometry has been carried out. The tool failure modes and the ways in which too...
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Even though significant progress has been made in the field of micro production and the development of miniaturized micro production-machines in the last ten years, an explicit consideration of clampingdevices has not taken place. The requirements for clamping technology in the manufacturing of microparts and the manufacturing of macroscale parts are highly different. Special clamping devices f...
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Excimer lasers are proving to be highly successful for fabricating industrial components with feature sizes in the range between 0.05–1,000μm (see Fig. 1). As well as providing a 15 year, 5 generation extension to optical lithography as used in the manufacture of silicon chips, excimer lasers are used for microfabricating many of the critical features in a wide variety of the electronic and tel...
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ژورنال
عنوان ژورنال: Laser Technik Journal
سال: 2008
ISSN: 1613-7728,1863-9119
DOI: 10.1002/latj.200890044